Carl Zeiss Sigma Variable Pressure Analytical SEM with Oxford Microanalysis

The Sigma is a field-emission SEM that produces exceptional images at high and low accelerating voltages. Together with its analytical capabilities, this instrument is suitable for a wide range of applications in materials and life science.

Sigma Capabilities:

  • Electron source: Schottky thermal field emitter
  • Accelerating voltage range: 0.2 to 30 kV
  • Current range: 4 pA to 20 nA
  • Variable pressure range: 2-133 Pa
  • Detectors: In-lens secondary electron, Everhart-Thornley secondary electron, variable pressure secondary electron, backscattered electron, infra-red chamberscope
  • Resolution at 1 kV/ 15 kV: 2.8 nm/1.5 nm
  • Maximum image size: 3072 x 2304 pixels
  • Large sample chamber that can accommodate specimens up to 250 mm diameter and 45 mm tall

Sigma Techniques:

  • Energy-dispersive X-ray analysis (EDX): 170 mm2 silicon-drift detector enables rapid determination of elemental compositions and acquisition of compositional maps
  • Wavelength-dispersive X-ray analysis (WDX): Detector facilitates high precision quantitative microanalysis
  • Electron backscatter diffraction (EBSD): HKL system permits determination of the orientations of crystalline samples at high spatial resolution and can be integrated with EDX
  • Scanning Transmission Electron Microscopy (STEM): Using a specialised detector, bright- and dark-field STEM images can be acquired from thin samples
  • Sample navigation: Sophisticated image referencing software allows navigation around the sample using images from a light microscope or flatbed scanner