Dr Muhammad M A Mirza
- Research Fellow (Electronic & Nanoscale Engineering)
email:
Muhammad.Mirza@glasgow.ac.uk
Rankine Building, Oakfield Avenue, School of Engineering, University of Glasgow, Glasgow, G12 8LT
Publications
2025
Millar, R. et al. (2025) Pseudo-planar Ge-on-Si Avalanche Photodiode with >100 Gain and Low Excess Noise. In: SPIE Photonics West 2025, San Francisco, California, United States, 25-31 January 2025, 133620K. ISBN 9781510684720 (doi: 10.1117/12.3042259)
Modak, M. et al. (2025) Development of High-Performance Short-Wave Infrared Ge-on-Si Linear Mode Avalanche Photodiodes. In: Silicon Photonics XX, San Francisco, CA, United States, 28-30 Jan 2025, 133710E. ISBN 9781510684911 (doi: 10.1117/12.3043218)
2024
Fleming, F. et al. (2024) Surface-normal illuminated pseudo-planar Ge-on-Si avalanche photodiodes with high gain and low noise. Optics Express, 32(11), 19449. (doi: 10.1364/OE.521417)
Dumas, D. et al. (2024) Decoupling the dark count rate contributions in Ge-on-Si single photon avalanche diodes. In: SPIE OPTO 2024, San Francisco, California, USA, 27 Jan-01 Feb 2024, (doi: 10.1117/12.3001450)
2023
Coughlan, C., Mirza, M.M. ORCID: https://orcid.org/0000-0002-1789-224X, Kirdoda, J.
ORCID: https://orcid.org/0000-0001-5316-4496, Dumas, D., Smith, C, McCarthy, C.
ORCID: https://orcid.org/0009-0007-8386-5526, Millar, R.W.
ORCID: https://orcid.org/0000-0002-3299-2484 and Paul, D.J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2023)
Effect of Passivation on Selectively Grown Sub-µm Ge-on-Si Single Photon Avalanche Diode Detectors.
In: 2023 IEEE Silicon Photonics Conference (SiPhotonics), Arlington, VA, USA, 04-07 Apr 2023,
ISBN 9781665486552
(doi: 10.1109/SiPhotonics55903.2023.10141911)
Tetzner, H., Seifert, W., Skibitzki, O., Yamamoto, Y., Lisker, M., Mirza, M.M. ORCID: https://orcid.org/0000-0002-1789-224X, Fischer, I.A., Paul, D.J.
ORCID: https://orcid.org/0000-0001-7402-8530, De Seta, Monia and Capellini, G.
(2023)
Unintentional p-type conductivity in intrinsic Ge-rich SiGe/Ge heterostructures grown on Si(001).
Applied Physics Letters, 122(24),
243503.
(doi: 10.1063/5.0152962)
Paul, D.J. et al. (2023) A Review of Ge-on-Si Single Photon Avalanche Diode (SPAD) Photodetectors and Applications. ISTDM-ICSI-2023, Como, Italy, 21-25 May 2023.
Tetzner, Henriette, Skibitzki, Oliver, Seifert, Winfried, Lisker, Marco, Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, Fischer, Inga A., Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530, De Seta, Monica and Capellini, Giovanni
(2023)
Background Carrier Concentration in Intrinsic Ge-Rich SiGe/Ge Heterostructures Integrated on Si(001).
ISTDM-ICSI-2023, Como, Italy, 21-25 May 2023.
Coughlan, Conor, Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, Kirdoda, Jaroslaw
ORCID: https://orcid.org/0000-0001-5316-4496, Dumas, Derek, Smith, Charles, McCarthy, Charlie
ORCID: https://orcid.org/0009-0007-8386-5526, Mowbray, Hannah, Watson, Scott
ORCID: https://orcid.org/0000-0002-9235-9242, Millar, Ross
ORCID: https://orcid.org/0000-0002-3299-2484 and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2023)
Variation of Sidewall Passivation on Sub-um Selectively Grown Ge-on-Si Devices Towards Single Photon Avalanche Detectors.
In: SPIE OPTO 2023, San Francisco, CA, USA, 28 Jan-3 Feb 2023,
124170M.
ISBN 9781510659391
(doi: 10.1117/12.2665493)
Smith, C. et al. (2023) Simulation and Design Optimization of Germanium-on-Silicon Single Photon Avalanche Diodes. In: SPIE OPTO 2023, San Francisco, CA, USA, 28 Jan-3 Feb 2023, 124260S. ISBN 9781510659575 (doi: 10.1117/12.2650154)
2022
David, S. et al. (2022) THz Silicon Photonics: An Intersubband Emitter. In: Photonics West - Quantum Sensing and Nano Electronics and Photonics XVIII, San Francisco, California, United States, 22-27 January, 2022, (doi: 10.1117/12.2609437)
2021
Stark, D. et al. (2021) THz Intersubband Emitter based on Silicon. In: 27th International Semiconductor Laser Conference (ISLC 2021), Potsdam, Germany, 10-14 Oct 2021, ISBN 9781665430944 (doi: 10.1109/ISLC51662.2021.9615725)
Stark, D. et al. (2021) Terahertz intersubband electroluminescence from n-type germanium quantum wells. In: 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), Munich, Germany, 21-25 June 2021, ISBN 9781665448048 (doi: 10.1109/CLEO/Europe-EQEC52157.2021.9541838)
Stark, D. et al. (2021) THz intersubband electroluminescence from n-type Ge/SiGe quantum cascade structures. Applied Physics Letters, 118(10), 101101. (doi: 10.1063/5.0041327)
David, S. et al. (2021) THz emission from n-type Ge/SiGe quantum cascade structures. Proceedings Volume 11685, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIV, California, United States, 6-12 March 2021. (doi: 10.1117/12.2578823)
Tetzner, H., Fischer, I.A., Skibitzki, O., Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, Manganelli, C.L., Luongo, G., Spirito, D., Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530, De Seta, M. and Capellini, G.
(2021)
Current leakage mechanisms related to threading dislocations in Ge-rich SiGe heterostructures grown on Si(001).
Applied Physics Letters, 119(15),
153504.
(doi: 10.1063/5.0064477)
2020
Millar, R. W. et al. (2020) Ge-on-Si Single Photon Avalanche Diode Detectors for LIDAR in the Short Wave Infrared. In: CLEO: Applications and Technology 2020, Washington, DC, USA, 10-15 May 2020, AF2I.6. ISBN 9781943580767 (doi: 10.1364/CLEO_AT.2020.AF2I.6)
Kirdoda, Jaroslaw ORCID: https://orcid.org/0000-0001-5316-4496, Dumas, Derek C.S., Millar, Ross W.
ORCID: https://orcid.org/0000-0002-3299-2484, Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530, Kuzmenko, Kateryna, Vines, Peter, Greener, Zoe and Buller, Gerald S.
(2020)
Geiger Mode Ge-on-Si Single-Photon Avalanche Diode Detectors.
In: 2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP), London, UK, 11-13 Dec 2019,
ISBN 9781728149486
(doi: 10.1109/BICOP48819.2019.9059574)
The University Court Of The University of Glasgow. Heriot-Watt University (2020) Single photon avalanche detector, method for use therefore and for its manufacture. .
Kuzmenko, K. et al. (2020) 3D LIDAR imaging using Ge-on-Si single–photon avalanche diode detectors. Optics Express, 28(2), pp. 1330-1344. (doi: 10.1364/OE.383243)
2019
Kirdoda, Jaroslaw ORCID: https://orcid.org/0000-0001-5316-4496, Dumas, Derek C.S., Kuzmenko, Kateryna, Vines, Peter, Greener, Zoe M., Millar, Ross W.
ORCID: https://orcid.org/0000-0002-3299-2484, Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Buller, Gerald S. and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2019)
Geiger Mode Ge-on-Si Single-Photon Avalanche Diode Detectors.
In: 2019 IEEE 16th International Conference on Group IV Photonics (GFP), Singapore, 28-30 Aug 2019,
ISBN 9781728109053
(doi: 10.1109/GROUP4.2019.8853918)
Kirdoda, J. ORCID: https://orcid.org/0000-0001-5316-4496, Ferre Llin, L., Kuzmenko, K., Vines, P., Greener, Z., Dumas, D.C.S., Millar, R.
ORCID: https://orcid.org/0000-0002-3299-2484, Mirza, M.M.
ORCID: https://orcid.org/0000-0002-1789-224X, Buller, G.S. and Paul, D.J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2019)
High Efficiency Planar Ge-on-Si Single-Photon Avalanche Diode Detectors.
CLEO: QELS_Fundamental Science 2019, San Jose, CA, USA, 05-10 May 2019.
ISBN 9781943580576
Vines, Peter, Kuzmenko, Kateryna, Kirdoda, Jarosław ORCID: https://orcid.org/0000-0001-5316-4496, Dumas, Derek C.S., Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Millar, Ross W.
ORCID: https://orcid.org/0000-0002-3299-2484, Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530 and Buller, Gerald S.
(2019)
High performance planar germanium-on-silicon single-photon avalanche diode detectors.
Nature Communications, 10,
1086.
(doi: 10.1038/s41467-019-08830-w)
(PMID:30842439)
(PMCID:PMC6403241)
Kuzmenko, K. et al. (2019) Planar Geometry Ge-on-Si SPAD Detectors for the Short-wave Infrared. Advanced Photon Counting Techniques XIII, Baltimore, MD, USA, 14-18 Apr 2019. p. 24. ISBN 9781510626218 (doi: 10.1117/12.2518858)
2018
Schupp, F.J., Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, G Andrew D., Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530 and Mol, Jan A.
(2018)
Quantum interference in silicon 1D junctionless nanowire field-effect transistors.
Physical Review B, 98(23),
235428.
(doi: 10.1103/PhysRevB.98.235428)
Zhou, Haiping, Fu, Yen-Chun, Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X and Li, Xu
ORCID: https://orcid.org/0000-0002-4220-4605
(2018)
Thermal and Plasma Enhanced Atomic Layer Deposition of Al2O3 and HfO2 Films Investigated by Using in situ Auger Electron Spectroscopy.
AVS 18th International Conference on Atomic Layer Deposition (ALD) Featuring the 5th International Atomic Layer Etching Workshop (ALE), Incheon, Korea, 29 Jul - 01 Aug 2018.
Carrillo-Nuñez, Hamilton, Mirza, Muhamad M. ORCID: https://orcid.org/0000-0002-1789-224X, Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Asenov, Asen
ORCID: https://orcid.org/0000-0002-9567-6366 and Georgiev, Vihar P.
ORCID: https://orcid.org/0000-0001-6473-2508
(2018)
Impact of randomly distributed dopants on Ω-gate junctionless silicon nanowire transistors.
IEEE Transactions on Electron Devices, 65(5),
pp. 1692-1698.
(doi: 10.1109/TED.2018.2817919)
Georgiev, Vihar P. ORCID: https://orcid.org/0000-0001-6473-2508, Dochioiu, Alexandru-Iusti, Adamu-Lema, Fikru, Berrada, Salim, Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530 and Asenov, Asen
ORCID: https://orcid.org/0000-0002-9567-6366
(2018)
Variability Study of High Current Junctionless Silicon Nanowire Transistors.
In: 12th IEEE Nanotechnology Materials and Devices Conference (NMDC 2017), Singapore, 2-4 Oct 2017,
ISBN 9781538627723
(doi: 10.1109/NMDC.2017.8350514)
Ghisetti, Emanuele Alberto, Dumas, Derek, Kirdoda, Jarosław ORCID: https://orcid.org/0000-0001-5316-4496, Gallacher, Kevin
ORCID: https://orcid.org/0000-0002-4733-3940, Millar, Ross William
ORCID: https://orcid.org/0000-0002-3299-2484, Mirza, Muhammad M.A.
ORCID: https://orcid.org/0000-0002-1789-224X and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2018)
Germanium on Silicon Single Photon Avalanche Detectors Using Silicon-on-Insulator Substrates.
Integrated Optics: Devices, Materials, and Technologies XXII, San Francisco, CA, USA, 29 Jan - 01 Feb 2018.
(doi: 10.1117/12.2290403)
2017
Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, Schupp, F.J., Mol, J.A., MacLaren, D.
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, G.A.D. and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2017)
Many-Body Effects in 1D Degenerately-Doped Silicon Nanowire Devices.
Silicon Quantum Information Processing (SiQIP), Lancaster, UK, 11 Sep 2017.
Radhakrishnan, Nivedha, Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, D.
ORCID: https://orcid.org/0000-0003-0641-686X and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2017)
Electron Transport in Top-down Fabricated Silicon Nanowires Using Relaxed and Scalable Nanofabrication.
Silicon Quantum Information Processing (SiQIP), Lancaster, UK, 11 Sep 2017.
Schupp, F J., Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, Mol, J.A., MacLaren, D.
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, G.A.D. and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2017)
Quantum Interference Effects in Degenerately Doped Silicon Nanowire Junction-less Transistors.
Silicon Quantum Information Processing (SiQIP), Lancaster, UK, 11 Sep 2017.
Georgiev, Vihar P. ORCID: https://orcid.org/0000-0001-6473-2508, Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Dochioiu, Alexandru-Iustin, Lema, Fikru-Adamu, Amoroso, Salvatore M., Towie, Ewan, Riddet, Craig, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Asenov, Asen
ORCID: https://orcid.org/0000-0002-9567-6366 and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2017)
Experimental and simulation study of 1D silicon nanowire transistors using heavily doped channels.
IEEE Transactions on Nanotechnology, 16(5),
pp. 727-735.
(doi: 10.1109/TNANO.2017.2665691)
Zhou, Haiping, Fu, Yen-Chun and Mirza, Muhammad ORCID: https://orcid.org/0000-0002-1789-224X
(2017)
Characterization of Al2O3 and HfO2 Grown on Metal Surfaces with Thermal and Plasma Enhanced Atomic Layer Deposition.
AVS 17th International Conference on Atomic Layer Deposition (ALD 2017) featuring the 4th International Atomic Layer Etching Workshop (ALE 2017), Denver, CO, USA, 15-18 Jul 2017.
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, Schupp, Felix J., Mol, Jan A., MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, G. Andrew D. and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2017)
One dimensional transport in silicon nanowire junction-less field effect transistors.
Scientific Reports, 7,
3004.
(doi: 10.1038/s41598-017-03138-5)
(PMID:28592820)
(PMCID:PMC5462787)
Schupp, Felix, Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, Andrew, Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530 and Mol, Jan
(2017)
Silicon Transistors in Reduced Dimensions.
American Physical Society (APS) March Meeting, New Orleans, LA, USA, 13-17 Mar 2017.
2016
Georgiev, Vihar P. ORCID: https://orcid.org/0000-0001-6473-2508, Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Dochioiu, Alexandru-Iustin, Lema, Fikru-Adamu, Amoroso, Salvatore M., Towie, Ewan, Riddet, Craig, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Asenov, Asen
ORCID: https://orcid.org/0000-0002-9567-6366 and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2016)
Experimental and Simulation Study of a High Current 1D Silicon Nanowire Transistor Using Heavily Doped Channels.
In: 2016 IEEE Nanotechnology Materials and Devices Conference (NMDC), Toulouse, France, 9-12 Oct 2016,
ISBN 9781509043521
(doi: 10.1109/NMDC.2016.7777084)
Schupp, Felix J., Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, Andrew A.D., Mol, Jan A. and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2016)
Top‐Down Fabricated Silicon Nanowire Junctionless Transistors.
Silicon Quantum Electronics Workshop, Delft, Netherlands, 13-14 Jun 2016.
Paul, Douglas ORCID: https://orcid.org/0000-0001-7402-8530, Mirza, Muhammad M.A.
ORCID: https://orcid.org/0000-0002-1789-224X and MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X
(2016)
Si Nanowires and their Transistor Properties.
EMN Meeting on Nanowires, Amsterdam, Netherlands, 16-19 May 2016.
2015
Schupp, F. et al. (2015) Ultra Scaled Silicon Nanowire Single Electron Transistors. Silicon Quantum Information Processing 2015: Scaling up (SiQIP2015), Cambridge, UK, 11 Sep 2015.
2014
Busche, C. et al. (2014) Design and fabrication of memory devices based on nanoscale polyoxometalate clusters. Nature, 515(7528), pp. 545-549. (doi: 10.1038/nature13951) (PMID:25409147)
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Samarelli, Antonio, Holmes, Barry M., Zhou, Haiping, Thoms, Stephen
ORCID: https://orcid.org/0000-0001-7820-6023, MacIntyre, Douglas and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2014)
Determining the electronic performance limitations in top-down fabricated Si nanowires with mean widths down to 4 nm.
Nano Letters, 14(11),
pp. 6056-6060.
(doi: 10.1021/nl5015298)
Samarelli, Antonio, Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, Ferre Llin, Lourdes, MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2014)
Lateral Transport and Thermoelectric Performance of Silicon Nanowires.
In: 12th European Conference on Thermoelectrics, Madrid, Spain, 24–26 Sep 2014,
2013
Li, Xu ORCID: https://orcid.org/0000-0002-4220-4605, Ignatova, Olesya
ORCID: https://orcid.org/0000-0001-7346-7515, Cao, Menglin, Peralagu, Uthayasankaran
ORCID: https://orcid.org/0000-0001-9166-4408, Steer, Matthew, Mirza, Muhammad
ORCID: https://orcid.org/0000-0002-1789-224X, Zhou, Haiping and Thayne, Iain
ORCID: https://orcid.org/0000-0002-9197-5393
(2013)
10 nm vertical In0.53Ga0.47As line etching process for III-V MOSFET fabrication by using inductively coupled plasma (ICP) etcher in Cl2/CH4/H2 chemistry.
In: 26th International Microprocesses and Nanotechnology Conference (MNC), Royton Sapporo, Hokkaido, Japan, 5-8 Nov 2013,
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, Thoms, Stephen
ORCID: https://orcid.org/0000-0001-7820-6023, Macintyre, Douglas, MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2013)
Fabrication and Characterization of Silicon Nanowires with Width Down to 1.9 nm.
In: 39th International Conference on Micro and Nano Engineering (MNE), London, UK, 16-19 Sep 2013,
Samarelli, Antonio, Ferre Llin, Lourdes, Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2013)
The Thermoelectric Properties of Sub-50 nm Silicon Nanowires.
In: 39th International Conference on Micro and Nano Engineering (MNE), London, UK, 16-19 Sep 2013,
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2013)
Silicon Nanowires with Widths Down to 1.9 nm for Breath Analysis Applications.
Glasgow Research Partnership in Engineering (GRPE) Conference, Glasgow, UK, 19 Jun 2013.
Ignatova, O. et al. (2013) Towards vertical sidewalls in III-V FinFETs: dry etch processing and its associated damage on the electrical and physical properties of (100)-oriented InGaAs. In: 44th IEEE Semiconductor Interface Specialists Conference (SISC), Arlington, VA, USA, 5-7 Dec 2013, pp. 167-168.
2012
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, Zhou, Haiping, Velha, Philippe, Li, Xu
ORCID: https://orcid.org/0000-0002-4220-4605, Docherty, Kevin E., Samarelli, Antonio, Ternent, Gary and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2012)
Nanofabrication of high aspect ratio (∼50:1) sub-10 nm silicon nanowires using inductively coupled plasma etching.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 30(6),
06FF02.
(doi: 10.1116/1.4755835)
Mirza, Muhammad M A ORCID: https://orcid.org/0000-0002-1789-224X, Zhou, Haiping, Docherty, Kevin, Thoms, Stephen
ORCID: https://orcid.org/0000-0001-7820-6023, Macintyre, Douglas and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2012)
High Aspect Ratio (~25:1) Sub-10 Nm HSQ Lines Using Electron Beam Lithography.
In: EIPBN 2012: The 56th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Waikoloa,HI USA, 29 May - 01 June 2012., Waikoloa, HI, USA, 29 May - 1 June 2012,
Mirza, M.M. ORCID: https://orcid.org/0000-0002-1789-224X, Velha, P., Ternent, G., Zhou, H.P., Docherty, K.E. and Paul, D.J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2012)
Silicon nanowire devices with widths below 5nm.
In: 12th IEEE Conference on Nanotechnology, Birmingham, UK, 20-23 Aug 2012,
(doi: 10.1109/NANO.2012.6322005)
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, Zhou, Haiping, Velha, Phillipe, Li, Xu
ORCID: https://orcid.org/0000-0002-4220-4605, Docherty, Kevin E., Samarelli, Antonio, Ternent, Gary and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2012)
Nanofabrication of high aspect ratio (˜50:1) sub-10 nm silicon nanowires using inductively coupled plasma etching.
In: EIPBN 2012: The 56th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Waikoloa,HI USA, 29 May - 01 June 2012,
Ternent, G., Mirza, M.M. ORCID: https://orcid.org/0000-0002-1789-224X, Missous, M. and Paul, D.
ORCID: https://orcid.org/0000-0001-7402-8530
(2012)
Scaling resonant tunnelling diodes and nanowires using SPICE modelling to optimise nanoscale performance.
In: 12th IEEE Conference on Nanotechnology, Birmingham, UK, 20-23 Aug 2012,
(doi: 10.1109/NANO.2012.6322050)
Articles
Fleming, F. et al. (2024) Surface-normal illuminated pseudo-planar Ge-on-Si avalanche photodiodes with high gain and low noise. Optics Express, 32(11), 19449. (doi: 10.1364/OE.521417)
Tetzner, H., Seifert, W., Skibitzki, O., Yamamoto, Y., Lisker, M., Mirza, M.M. ORCID: https://orcid.org/0000-0002-1789-224X, Fischer, I.A., Paul, D.J.
ORCID: https://orcid.org/0000-0001-7402-8530, De Seta, Monia and Capellini, G.
(2023)
Unintentional p-type conductivity in intrinsic Ge-rich SiGe/Ge heterostructures grown on Si(001).
Applied Physics Letters, 122(24),
243503.
(doi: 10.1063/5.0152962)
Stark, D. et al. (2021) THz intersubband electroluminescence from n-type Ge/SiGe quantum cascade structures. Applied Physics Letters, 118(10), 101101. (doi: 10.1063/5.0041327)
Tetzner, H., Fischer, I.A., Skibitzki, O., Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, Manganelli, C.L., Luongo, G., Spirito, D., Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530, De Seta, M. and Capellini, G.
(2021)
Current leakage mechanisms related to threading dislocations in Ge-rich SiGe heterostructures grown on Si(001).
Applied Physics Letters, 119(15),
153504.
(doi: 10.1063/5.0064477)
Kuzmenko, K. et al. (2020) 3D LIDAR imaging using Ge-on-Si single–photon avalanche diode detectors. Optics Express, 28(2), pp. 1330-1344. (doi: 10.1364/OE.383243)
Vines, Peter, Kuzmenko, Kateryna, Kirdoda, Jarosław ORCID: https://orcid.org/0000-0001-5316-4496, Dumas, Derek C.S., Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Millar, Ross W.
ORCID: https://orcid.org/0000-0002-3299-2484, Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530 and Buller, Gerald S.
(2019)
High performance planar germanium-on-silicon single-photon avalanche diode detectors.
Nature Communications, 10,
1086.
(doi: 10.1038/s41467-019-08830-w)
(PMID:30842439)
(PMCID:PMC6403241)
Schupp, F.J., Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, G Andrew D., Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530 and Mol, Jan A.
(2018)
Quantum interference in silicon 1D junctionless nanowire field-effect transistors.
Physical Review B, 98(23),
235428.
(doi: 10.1103/PhysRevB.98.235428)
Carrillo-Nuñez, Hamilton, Mirza, Muhamad M. ORCID: https://orcid.org/0000-0002-1789-224X, Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Asenov, Asen
ORCID: https://orcid.org/0000-0002-9567-6366 and Georgiev, Vihar P.
ORCID: https://orcid.org/0000-0001-6473-2508
(2018)
Impact of randomly distributed dopants on Ω-gate junctionless silicon nanowire transistors.
IEEE Transactions on Electron Devices, 65(5),
pp. 1692-1698.
(doi: 10.1109/TED.2018.2817919)
Georgiev, Vihar P. ORCID: https://orcid.org/0000-0001-6473-2508, Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Dochioiu, Alexandru-Iustin, Lema, Fikru-Adamu, Amoroso, Salvatore M., Towie, Ewan, Riddet, Craig, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Asenov, Asen
ORCID: https://orcid.org/0000-0002-9567-6366 and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2017)
Experimental and simulation study of 1D silicon nanowire transistors using heavily doped channels.
IEEE Transactions on Nanotechnology, 16(5),
pp. 727-735.
(doi: 10.1109/TNANO.2017.2665691)
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, Schupp, Felix J., Mol, Jan A., MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, G. Andrew D. and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2017)
One dimensional transport in silicon nanowire junction-less field effect transistors.
Scientific Reports, 7,
3004.
(doi: 10.1038/s41598-017-03138-5)
(PMID:28592820)
(PMCID:PMC5462787)
Busche, C. et al. (2014) Design and fabrication of memory devices based on nanoscale polyoxometalate clusters. Nature, 515(7528), pp. 545-549. (doi: 10.1038/nature13951) (PMID:25409147)
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Samarelli, Antonio, Holmes, Barry M., Zhou, Haiping, Thoms, Stephen
ORCID: https://orcid.org/0000-0001-7820-6023, MacIntyre, Douglas and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2014)
Determining the electronic performance limitations in top-down fabricated Si nanowires with mean widths down to 4 nm.
Nano Letters, 14(11),
pp. 6056-6060.
(doi: 10.1021/nl5015298)
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, Zhou, Haiping, Velha, Philippe, Li, Xu
ORCID: https://orcid.org/0000-0002-4220-4605, Docherty, Kevin E., Samarelli, Antonio, Ternent, Gary and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2012)
Nanofabrication of high aspect ratio (∼50:1) sub-10 nm silicon nanowires using inductively coupled plasma etching.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 30(6),
06FF02.
(doi: 10.1116/1.4755835)
Conference or Workshop Item
Paul, D.J. et al. (2023) A Review of Ge-on-Si Single Photon Avalanche Diode (SPAD) Photodetectors and Applications. ISTDM-ICSI-2023, Como, Italy, 21-25 May 2023.
Tetzner, Henriette, Skibitzki, Oliver, Seifert, Winfried, Lisker, Marco, Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, Fischer, Inga A., Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530, De Seta, Monica and Capellini, Giovanni
(2023)
Background Carrier Concentration in Intrinsic Ge-Rich SiGe/Ge Heterostructures Integrated on Si(001).
ISTDM-ICSI-2023, Como, Italy, 21-25 May 2023.
David, S. et al. (2021) THz emission from n-type Ge/SiGe quantum cascade structures. Proceedings Volume 11685, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIV, California, United States, 6-12 March 2021. (doi: 10.1117/12.2578823)
Kirdoda, J. ORCID: https://orcid.org/0000-0001-5316-4496, Ferre Llin, L., Kuzmenko, K., Vines, P., Greener, Z., Dumas, D.C.S., Millar, R.
ORCID: https://orcid.org/0000-0002-3299-2484, Mirza, M.M.
ORCID: https://orcid.org/0000-0002-1789-224X, Buller, G.S. and Paul, D.J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2019)
High Efficiency Planar Ge-on-Si Single-Photon Avalanche Diode Detectors.
CLEO: QELS_Fundamental Science 2019, San Jose, CA, USA, 05-10 May 2019.
ISBN 9781943580576
Kuzmenko, K. et al. (2019) Planar Geometry Ge-on-Si SPAD Detectors for the Short-wave Infrared. Advanced Photon Counting Techniques XIII, Baltimore, MD, USA, 14-18 Apr 2019. p. 24. ISBN 9781510626218 (doi: 10.1117/12.2518858)
Zhou, Haiping, Fu, Yen-Chun, Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X and Li, Xu
ORCID: https://orcid.org/0000-0002-4220-4605
(2018)
Thermal and Plasma Enhanced Atomic Layer Deposition of Al2O3 and HfO2 Films Investigated by Using in situ Auger Electron Spectroscopy.
AVS 18th International Conference on Atomic Layer Deposition (ALD) Featuring the 5th International Atomic Layer Etching Workshop (ALE), Incheon, Korea, 29 Jul - 01 Aug 2018.
Ghisetti, Emanuele Alberto, Dumas, Derek, Kirdoda, Jarosław ORCID: https://orcid.org/0000-0001-5316-4496, Gallacher, Kevin
ORCID: https://orcid.org/0000-0002-4733-3940, Millar, Ross William
ORCID: https://orcid.org/0000-0002-3299-2484, Mirza, Muhammad M.A.
ORCID: https://orcid.org/0000-0002-1789-224X and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2018)
Germanium on Silicon Single Photon Avalanche Detectors Using Silicon-on-Insulator Substrates.
Integrated Optics: Devices, Materials, and Technologies XXII, San Francisco, CA, USA, 29 Jan - 01 Feb 2018.
(doi: 10.1117/12.2290403)
Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, Schupp, F.J., Mol, J.A., MacLaren, D.
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, G.A.D. and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2017)
Many-Body Effects in 1D Degenerately-Doped Silicon Nanowire Devices.
Silicon Quantum Information Processing (SiQIP), Lancaster, UK, 11 Sep 2017.
Radhakrishnan, Nivedha, Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, D.
ORCID: https://orcid.org/0000-0003-0641-686X and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2017)
Electron Transport in Top-down Fabricated Silicon Nanowires Using Relaxed and Scalable Nanofabrication.
Silicon Quantum Information Processing (SiQIP), Lancaster, UK, 11 Sep 2017.
Schupp, F J., Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, Mol, J.A., MacLaren, D.
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, G.A.D. and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2017)
Quantum Interference Effects in Degenerately Doped Silicon Nanowire Junction-less Transistors.
Silicon Quantum Information Processing (SiQIP), Lancaster, UK, 11 Sep 2017.
Zhou, Haiping, Fu, Yen-Chun and Mirza, Muhammad ORCID: https://orcid.org/0000-0002-1789-224X
(2017)
Characterization of Al2O3 and HfO2 Grown on Metal Surfaces with Thermal and Plasma Enhanced Atomic Layer Deposition.
AVS 17th International Conference on Atomic Layer Deposition (ALD 2017) featuring the 4th International Atomic Layer Etching Workshop (ALE 2017), Denver, CO, USA, 15-18 Jul 2017.
Schupp, Felix, Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, Andrew, Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530 and Mol, Jan
(2017)
Silicon Transistors in Reduced Dimensions.
American Physical Society (APS) March Meeting, New Orleans, LA, USA, 13-17 Mar 2017.
Schupp, Felix J., Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Briggs, Andrew A.D., Mol, Jan A. and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2016)
Top‐Down Fabricated Silicon Nanowire Junctionless Transistors.
Silicon Quantum Electronics Workshop, Delft, Netherlands, 13-14 Jun 2016.
Paul, Douglas ORCID: https://orcid.org/0000-0001-7402-8530, Mirza, Muhammad M.A.
ORCID: https://orcid.org/0000-0002-1789-224X and MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X
(2016)
Si Nanowires and their Transistor Properties.
EMN Meeting on Nanowires, Amsterdam, Netherlands, 16-19 May 2016.
Schupp, F. et al. (2015) Ultra Scaled Silicon Nanowire Single Electron Transistors. Silicon Quantum Information Processing 2015: Scaling up (SiQIP2015), Cambridge, UK, 11 Sep 2015.
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2013)
Silicon Nanowires with Widths Down to 1.9 nm for Breath Analysis Applications.
Glasgow Research Partnership in Engineering (GRPE) Conference, Glasgow, UK, 19 Jun 2013.
Conference Proceedings
Millar, R. et al. (2025) Pseudo-planar Ge-on-Si Avalanche Photodiode with >100 Gain and Low Excess Noise. In: SPIE Photonics West 2025, San Francisco, California, United States, 25-31 January 2025, 133620K. ISBN 9781510684720 (doi: 10.1117/12.3042259)
Modak, M. et al. (2025) Development of High-Performance Short-Wave Infrared Ge-on-Si Linear Mode Avalanche Photodiodes. In: Silicon Photonics XX, San Francisco, CA, United States, 28-30 Jan 2025, 133710E. ISBN 9781510684911 (doi: 10.1117/12.3043218)
Dumas, D. et al. (2024) Decoupling the dark count rate contributions in Ge-on-Si single photon avalanche diodes. In: SPIE OPTO 2024, San Francisco, California, USA, 27 Jan-01 Feb 2024, (doi: 10.1117/12.3001450)
Coughlan, C., Mirza, M.M. ORCID: https://orcid.org/0000-0002-1789-224X, Kirdoda, J.
ORCID: https://orcid.org/0000-0001-5316-4496, Dumas, D., Smith, C, McCarthy, C.
ORCID: https://orcid.org/0009-0007-8386-5526, Millar, R.W.
ORCID: https://orcid.org/0000-0002-3299-2484 and Paul, D.J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2023)
Effect of Passivation on Selectively Grown Sub-µm Ge-on-Si Single Photon Avalanche Diode Detectors.
In: 2023 IEEE Silicon Photonics Conference (SiPhotonics), Arlington, VA, USA, 04-07 Apr 2023,
ISBN 9781665486552
(doi: 10.1109/SiPhotonics55903.2023.10141911)
Coughlan, Conor, Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, Kirdoda, Jaroslaw
ORCID: https://orcid.org/0000-0001-5316-4496, Dumas, Derek, Smith, Charles, McCarthy, Charlie
ORCID: https://orcid.org/0009-0007-8386-5526, Mowbray, Hannah, Watson, Scott
ORCID: https://orcid.org/0000-0002-9235-9242, Millar, Ross
ORCID: https://orcid.org/0000-0002-3299-2484 and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2023)
Variation of Sidewall Passivation on Sub-um Selectively Grown Ge-on-Si Devices Towards Single Photon Avalanche Detectors.
In: SPIE OPTO 2023, San Francisco, CA, USA, 28 Jan-3 Feb 2023,
124170M.
ISBN 9781510659391
(doi: 10.1117/12.2665493)
Smith, C. et al. (2023) Simulation and Design Optimization of Germanium-on-Silicon Single Photon Avalanche Diodes. In: SPIE OPTO 2023, San Francisco, CA, USA, 28 Jan-3 Feb 2023, 124260S. ISBN 9781510659575 (doi: 10.1117/12.2650154)
David, S. et al. (2022) THz Silicon Photonics: An Intersubband Emitter. In: Photonics West - Quantum Sensing and Nano Electronics and Photonics XVIII, San Francisco, California, United States, 22-27 January, 2022, (doi: 10.1117/12.2609437)
Stark, D. et al. (2021) THz Intersubband Emitter based on Silicon. In: 27th International Semiconductor Laser Conference (ISLC 2021), Potsdam, Germany, 10-14 Oct 2021, ISBN 9781665430944 (doi: 10.1109/ISLC51662.2021.9615725)
Stark, D. et al. (2021) Terahertz intersubband electroluminescence from n-type germanium quantum wells. In: 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), Munich, Germany, 21-25 June 2021, ISBN 9781665448048 (doi: 10.1109/CLEO/Europe-EQEC52157.2021.9541838)
Millar, R. W. et al. (2020) Ge-on-Si Single Photon Avalanche Diode Detectors for LIDAR in the Short Wave Infrared. In: CLEO: Applications and Technology 2020, Washington, DC, USA, 10-15 May 2020, AF2I.6. ISBN 9781943580767 (doi: 10.1364/CLEO_AT.2020.AF2I.6)
Kirdoda, Jaroslaw ORCID: https://orcid.org/0000-0001-5316-4496, Dumas, Derek C.S., Millar, Ross W.
ORCID: https://orcid.org/0000-0002-3299-2484, Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530, Kuzmenko, Kateryna, Vines, Peter, Greener, Zoe and Buller, Gerald S.
(2020)
Geiger Mode Ge-on-Si Single-Photon Avalanche Diode Detectors.
In: 2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP), London, UK, 11-13 Dec 2019,
ISBN 9781728149486
(doi: 10.1109/BICOP48819.2019.9059574)
Kirdoda, Jaroslaw ORCID: https://orcid.org/0000-0001-5316-4496, Dumas, Derek C.S., Kuzmenko, Kateryna, Vines, Peter, Greener, Zoe M., Millar, Ross W.
ORCID: https://orcid.org/0000-0002-3299-2484, Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Buller, Gerald S. and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2019)
Geiger Mode Ge-on-Si Single-Photon Avalanche Diode Detectors.
In: 2019 IEEE 16th International Conference on Group IV Photonics (GFP), Singapore, 28-30 Aug 2019,
ISBN 9781728109053
(doi: 10.1109/GROUP4.2019.8853918)
Georgiev, Vihar P. ORCID: https://orcid.org/0000-0001-6473-2508, Dochioiu, Alexandru-Iusti, Adamu-Lema, Fikru, Berrada, Salim, Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530 and Asenov, Asen
ORCID: https://orcid.org/0000-0002-9567-6366
(2018)
Variability Study of High Current Junctionless Silicon Nanowire Transistors.
In: 12th IEEE Nanotechnology Materials and Devices Conference (NMDC 2017), Singapore, 2-4 Oct 2017,
ISBN 9781538627723
(doi: 10.1109/NMDC.2017.8350514)
Georgiev, Vihar P. ORCID: https://orcid.org/0000-0001-6473-2508, Mirza, Muhammad M.
ORCID: https://orcid.org/0000-0002-1789-224X, Dochioiu, Alexandru-Iustin, Lema, Fikru-Adamu, Amoroso, Salvatore M., Towie, Ewan, Riddet, Craig, MacLaren, Donald A.
ORCID: https://orcid.org/0000-0003-0641-686X, Asenov, Asen
ORCID: https://orcid.org/0000-0002-9567-6366 and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2016)
Experimental and Simulation Study of a High Current 1D Silicon Nanowire Transistor Using Heavily Doped Channels.
In: 2016 IEEE Nanotechnology Materials and Devices Conference (NMDC), Toulouse, France, 9-12 Oct 2016,
ISBN 9781509043521
(doi: 10.1109/NMDC.2016.7777084)
Samarelli, Antonio, Mirza, Muhammad M.A. ORCID: https://orcid.org/0000-0002-1789-224X, Ferre Llin, Lourdes, MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2014)
Lateral Transport and Thermoelectric Performance of Silicon Nanowires.
In: 12th European Conference on Thermoelectrics, Madrid, Spain, 24–26 Sep 2014,
Li, Xu ORCID: https://orcid.org/0000-0002-4220-4605, Ignatova, Olesya
ORCID: https://orcid.org/0000-0001-7346-7515, Cao, Menglin, Peralagu, Uthayasankaran
ORCID: https://orcid.org/0000-0001-9166-4408, Steer, Matthew, Mirza, Muhammad
ORCID: https://orcid.org/0000-0002-1789-224X, Zhou, Haiping and Thayne, Iain
ORCID: https://orcid.org/0000-0002-9197-5393
(2013)
10 nm vertical In0.53Ga0.47As line etching process for III-V MOSFET fabrication by using inductively coupled plasma (ICP) etcher in Cl2/CH4/H2 chemistry.
In: 26th International Microprocesses and Nanotechnology Conference (MNC), Royton Sapporo, Hokkaido, Japan, 5-8 Nov 2013,
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, Thoms, Stephen
ORCID: https://orcid.org/0000-0001-7820-6023, Macintyre, Douglas, MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2013)
Fabrication and Characterization of Silicon Nanowires with Width Down to 1.9 nm.
In: 39th International Conference on Micro and Nano Engineering (MNE), London, UK, 16-19 Sep 2013,
Samarelli, Antonio, Ferre Llin, Lourdes, Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, MacLaren, Donald
ORCID: https://orcid.org/0000-0003-0641-686X and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2013)
The Thermoelectric Properties of Sub-50 nm Silicon Nanowires.
In: 39th International Conference on Micro and Nano Engineering (MNE), London, UK, 16-19 Sep 2013,
Ignatova, O. et al. (2013) Towards vertical sidewalls in III-V FinFETs: dry etch processing and its associated damage on the electrical and physical properties of (100)-oriented InGaAs. In: 44th IEEE Semiconductor Interface Specialists Conference (SISC), Arlington, VA, USA, 5-7 Dec 2013, pp. 167-168.
Mirza, Muhammad M A ORCID: https://orcid.org/0000-0002-1789-224X, Zhou, Haiping, Docherty, Kevin, Thoms, Stephen
ORCID: https://orcid.org/0000-0001-7820-6023, Macintyre, Douglas and Paul, Douglas
ORCID: https://orcid.org/0000-0001-7402-8530
(2012)
High Aspect Ratio (~25:1) Sub-10 Nm HSQ Lines Using Electron Beam Lithography.
In: EIPBN 2012: The 56th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Waikoloa,HI USA, 29 May - 01 June 2012., Waikoloa, HI, USA, 29 May - 1 June 2012,
Mirza, M.M. ORCID: https://orcid.org/0000-0002-1789-224X, Velha, P., Ternent, G., Zhou, H.P., Docherty, K.E. and Paul, D.J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2012)
Silicon nanowire devices with widths below 5nm.
In: 12th IEEE Conference on Nanotechnology, Birmingham, UK, 20-23 Aug 2012,
(doi: 10.1109/NANO.2012.6322005)
Mirza, Muhammad M. ORCID: https://orcid.org/0000-0002-1789-224X, Zhou, Haiping, Velha, Phillipe, Li, Xu
ORCID: https://orcid.org/0000-0002-4220-4605, Docherty, Kevin E., Samarelli, Antonio, Ternent, Gary and Paul, Douglas J.
ORCID: https://orcid.org/0000-0001-7402-8530
(2012)
Nanofabrication of high aspect ratio (˜50:1) sub-10 nm silicon nanowires using inductively coupled plasma etching.
In: EIPBN 2012: The 56th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Waikoloa,HI USA, 29 May - 01 June 2012,
Ternent, G., Mirza, M.M. ORCID: https://orcid.org/0000-0002-1789-224X, Missous, M. and Paul, D.
ORCID: https://orcid.org/0000-0001-7402-8530
(2012)
Scaling resonant tunnelling diodes and nanowires using SPICE modelling to optimise nanoscale performance.
In: 12th IEEE Conference on Nanotechnology, Birmingham, UK, 20-23 Aug 2012,
(doi: 10.1109/NANO.2012.6322050)
Patents
The University Court Of The University of Glasgow. Heriot-Watt University (2020) Single photon avalanche detector, method for use therefore and for its manufacture. .
Research datasets
2017
Georgiev, V. , Mirza, M. M. A. , Dochioiu, A.-I., Lema, F.-A., Amoroso, S., Towie, E., Riddet, C., MacLaren, D. , Asenov, A. and Paul, D. (2017) Experimental and simulation study of 1D silicon nanowire transistors using heavily doped channels. [Data Collection]