Ellipsometer
Location: SRDG cleanroom
Ellipsometry is an optical technique for characterising optical constants of surfaces and thin films and also measuring film thicknesses. Collimated monochromatic light is polarized either parallel or perpendicular to the surface, and is incident on the surface at a chosen angle. Upon reflection the two polarization states undergo different amplitude and phase changes, dependent on the optical constants and thicknesses of the film(s), and that of the substrate, and the incident light wavelength.
The SE850 spectroscopic ellipsometer has a wavelength range from 240- 1650 nm which can be used to measure refractive index and thickness of single or multilayer dielectric coatings on a variety of substrate materials.
