2025

Peeters, S. A. et al. (2025) Superconducting Nb x Ti1− x N prepared at high deposition rates with plasma-enhanced atomic layer deposition and substrate biasing. AVS Quantum Science, 7(2), 026801. (doi: 10.1116/5.0254908)

2023

Peeters, Silke A., Lennon, Ciaran T., Merkx, Marc J.M., Hadfield, Robert H. ORCID: https://orcid.org/0000-0002-8084-4187, Kessels, W. M. M. (Erwin), Verheijen, Marcel A. and Knoops, Harm C. M. (2023) Ultrathin superconducting TaCxN1−x films prepared by plasma-enhanced atomic layer deposition with ion-energy control. Applied Physics Letters, 123, 132603. (doi: 10.1063/5.0169339)

Seferai, V. et al. (2023) Recent Material Developments for Superconducting Quantum Circuits. 2023 Cryogenic Engineering Conference and International Cryogenic Materials Conference (CEC & ICMC 2023), Honolulu, HI, USA, 09-13 Jul 2023.

Articles

Peeters, S. A. et al. (2025) Superconducting Nb x Ti1− x N prepared at high deposition rates with plasma-enhanced atomic layer deposition and substrate biasing. AVS Quantum Science, 7(2), 026801. (doi: 10.1116/5.0254908)

Peeters, Silke A., Lennon, Ciaran T., Merkx, Marc J.M., Hadfield, Robert H. ORCID: https://orcid.org/0000-0002-8084-4187, Kessels, W. M. M. (Erwin), Verheijen, Marcel A. and Knoops, Harm C. M. (2023) Ultrathin superconducting TaCxN1−x films prepared by plasma-enhanced atomic layer deposition with ion-energy control. Applied Physics Letters, 123, 132603. (doi: 10.1063/5.0169339)

Conference or Workshop Item

Seferai, V. et al. (2023) Recent Material Developments for Superconducting Quantum Circuits. 2023 Cryogenic Engineering Conference and International Cryogenic Materials Conference (CEC & ICMC 2023), Honolulu, HI, USA, 09-13 Jul 2023.