Julius-Maximilians Universität Würzburg
The chair of Technische Physik, Department of Physics and Astronomy, University of Würzburg, is a technology center for advanced lithography and processing for nanoelectronic and nanophotonic materials and devices. The group has around 40 staff members including students and utilizes the Gottfried Landwehr Laboratory for Nanotechnology, a 550 m2 cleanroom facility, for the development of novel nanomaterials, nanofabrication technologies and their application to new devices. In addition to several molecular beam epitaxy systems for quantum well and quantum dot heterostructure growths in different material systems, the clean room is equipped with two high resolution electron beam lithography systems, high resolution electron microscopes, different dry etching systems, metallization systems etc.
The group has participated and is currently participating in a variety of EU projects as project partner, work package leader and project coordinator (e.g. Q-SWITCH, NEAR, ULTRABRIGHT, NANO-TCAD, BIGBAND, NODE, SUBTLE, QUANTIP, NANOPOWER, LANDAUER) with the major emphasis on nanostructure device research for future emerging technologies, classical and quantum computation and quantum communication.