Nanofabrication ENG5174

  • Academic Session: 2023-24
  • School: School of Engineering
  • Credits: 10
  • Level: Level 5 (SCQF level 11)
  • Typically Offered: Semester 1
  • Available to Visiting Students: No

Short Description

This course* will introduce students to the principles and practice of nanofabrication. It covers lithography, pattern transfer, inspection and electrical testing; the students complete a short fabrication project during the course.


*Only register for this course if you have an immediate need for semiconductor fabrication cleanroom training - for instance for initial training of PhD students planning to work in the James Watt Nano-fabrication Centre. It will be a poor fit for students interested in semiconductor fabrication in general. The course ENG5055 Micro & Nano Technology is offered to give that more general background and will be a better fit for the majority of students.


A four hour block comprising lecture and laboratory session once per week.

Requirements of Entry

Mandatory Entry Requirements


Recommended Entry Requirements


Excluded Courses





20% Written Assignment

30% Oral presentation

50% Report

Main Assessment In: December

Course Aims

The aims of this course are to:

■ guide the students through a short nanofabrication project ;

■ give the students a broad understanding of nanofabrication technologies;

■ give the students practical experience in using a range of nanofabrication technology.

Intended Learning Outcomes of Course

By the end of this course students will be able to:

■ effectively operate a range of nanofabrication tools;

■ appreciate how each tool works and the Physics and Chemistry of the processes involved;

■ design multi-step processes to fabricate simple nanoscale objects;

■ carry out multistep nanofabrication processes with an appropriate level of skill.

Minimum Requirement for Award of Credits

Students must submit at least 75% by weight of the components of the course's summative assessment.


Students must attend the timetabled laboratory classes.


Students should attend at least 75% of the timetabled classes of the course.


Note that these are minimum requirements: good students will achieve far higher participation/submission rates.  Any student who misses an assessment or a significant number of classes because of illness or other good cause should report this by completing a MyCampus absence report.