Dr Matthew Smith

  • Research Assistant (Electronic & Nanoscale Engineering)

Publications

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Jump to: 2017
Number of items: 1.

2017

Li, X. et al. (2017) Atomic layer etch processes developed in an ICP/RIE etching system for etching III-V compound semiconductor materials. AVS 17th International Conference on Atomic Layer Deposition (ALD 2017) featuring the 4th International Atomic Layer Etching Workshop (ALE 2017), Denver, CO, USA, 15-18 Jul 2017.

This list was generated on Fri Dec 14 18:11:33 2018 GMT.
Number of items: 1.

Conference or Workshop Item

Li, X. et al. (2017) Atomic layer etch processes developed in an ICP/RIE etching system for etching III-V compound semiconductor materials. AVS 17th International Conference on Atomic Layer Deposition (ALD 2017) featuring the 4th International Atomic Layer Etching Workshop (ALE 2017), Denver, CO, USA, 15-18 Jul 2017.

This list was generated on Fri Dec 14 18:11:33 2018 GMT.