The James Watt Nanofabrication Centre
The James Watt Nanofabrication Centre (JWNC) is a new interdisciplinary research centre with 750 m2 of cleanroom space.
The range of fabrication equipment that this facility houses is amongst the widest to be found in a UK university and allows users to make complex devices ranging in size from microns down to nanometres.
To do this sort of fabrication we make use of state-of-the-art tools to perform large area electron beam lithography (capable of writing patterns with a 4 nm spot size); metal and dielectric sputtering using RF and DC magnetrons; electron beam and thermal metal evaporation; mask aligning (with double sided capability); flip-chip bonding; nano-scale embossing; high resolution scanning electron microscopy; atomic force microscopy; surface profilometry; plasma deposition; and reactive ion etching.
The Centre has more than 140 registered users from departments across the University and access for external users is either through a research collaboration or, on a purely commercial basis, through Kelvin Nanotechnology.
The Centre brings together many researchers whose interests range from engineering to the physical or life sciences. An interactive web based user interface, weekly JWNC user meetings and equipment training courses give users the opportunity to develop new processing techniques allowing them to turn interesting ideas into reality, pushing forward the frontiers of research and technology.
Available Equipment
- Vistec VB6 UHR EWF large area lithography tool
- Hitachi S4700 SEM
- Hitachi S3000 SEM
- Veeco Dimension 3000 atomic force microscope
- Veeco Dektak 6 surface profilometer
- SUSS MA6 mask aligner
- Plassys MEB 450 electron beam evaporator with Au,Ge,Ni,NiCr,Ti,Pd
- Plassys MEB 400S cryo pumped electron beam evaporator with Pt,Pd,Au,Ge,Ti,NiCr,Al
- Plassys MP900S 6 target sputtering tool with 3 DC magnetrons and 3 RF magnetrons
- 5 RIE and ICP etching tools
- 3 x PECVD and ICP dielectric deposition tools
For more information about the centre and the facilities and services available please contact:
Kelvin Nanotechnology on +44 (0) 141 330 4869, email enquiries@kelvinnanotechnology.com or visit their website.
